Senior Equipment Engineer (Plasma)

Technical Expertise (Plasma Etch)

• Strong knowledge of plasma etch systems (RF gen, ESC, Wafer backside gas cooling system)

• Understanding theory of plasma creation

• Hands-on chamber full wet clean, lifter pin motor assy replacement / servicing, robot change, slip valve change …..etc

• Strong capability to troubleshoot ultra low particle count and ICPMS.

Equipment Performance & Reliability

• Perform preventive maintenance (PM) and corrective maintenance (CM)

• Troubleshoot equipment failures and minimize downtime

• Ensure machines meet operational and safety standards

• Manage spare parts and critical component tracking

• Balance PM tool time with manufacturing

• May require on-call support for critical situation

Process Support & Optimization

• Support production by ensuring stable processes

• Work closely with process engineers to optimize tool parameters

• Monitor tool performance using SPC (Statistical Process Control)

• Drive improvements in yield and defect reduction

Troubleshooting & Problem Solving

• Conduct root cause analysis (RCA) for equipment and process issues

• Apply structured problem-solving methods (e.g., 8D, Fishbone, FMEA)

• Implement corrective actions and preventive actions (CAPA)

Continuous Improvement

• Lead or participate in productivity and cost-reduction projects

• Improve Mean Time Between Failures (MTBF) and Mean Time To Repair (MTTR)

• Enhance equipment efficiency and automation

Installation & Qualification

• Support new equipment installation, setup, and acceptance (SAT/FAT)

• Perform equipment qualification and process buy-off

• Collaborate with vendors for upgrades and modifications

Documentation & Reporting

• Maintain accurate maintenance records and technical documentation

• Prepare reports on equipment performance, downtime, and improvements

• Update SOPs and work instructions

Safety & Sustainability

• Ensure compliance with fab safety protocols and cleanroom standards

• Handle high-voltage systems, vacuum systems, and hazardous gases safely

• Balance equipment sustainability vs needs

Key Performance Indicators

• Equipment uptime (%)

• OEE

• Yield impact

• PM compliance rate

• FDC trigger rate

Soft Skills

• Strong analytical and problem-solving skills

• Ability to work under pressure in a high-volume manufacturing environment

• Good communication and teamwork

• Proactive and self-driven mindset

• Utilizing goggle office & Gemini AI